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E

Term Definition
EDS: Energy Dispersive Spectroscopy

A technique that is based on the characteristic X-ray peaks that are generated when an energetic electron beam interacts with the specimen. Each element produces characteristic x-rays that may be used to identify the presence of that element in the region being examined. Comparison of the relative intensities of x-ray peaks may be used to determine the relative concentrations of each element in the specimen. Elements with an atomic number less than that of carbon carbon (Z=5) are not generally detectable.