The production of backscattered electrons varies directly with the specimen's atomic number. This differing production rates causes higher atomic number elements to appear brighter than lower atomic number elements. This interaction is utilized to differentiate parts of the specimen that have different average atomic number. (See Interaction Volume) An example is shown in the SEM output section, specifically the mechanically alloyed specimen micrograph. Detection of Backscattered Electrons is achieved by using a "donut" shaped solid state semiconductor device mounted on the bottom of the objective lens. When Backscattered Electrons strike the detector electron-hole pairs are created which are then counted. This quantity is translated into a pixel intensity and displayed on the CRT, forming the image. See the SEM page for details on image formation.

A technique that is based on the characteristic X-ray peaks that are generated when an energetic electron beam interacts with the specimen. Each element produces characteristic x-rays that may be used to identify the presence of that element in the region being examined. Comparison of the relative intensities of x-ray peaks may be used to determine the relative concentrations of each element in the specimen. Elements with an atomic number less than that of carbon carbon (Z=5) are not generally detectable.

Spectroscopy is a field of analytical chemistry that uses X-ray spectra of elements for analysis of chemical substances.